| 摘要 |
PROBLEM TO BE SOLVED: To provide a work deformation/distortion detecting method for allowing in-line inspection and determination, while using a general and commercial camera, as it is. SOLUTION: A block B is movably installed on a stage S in the horizontal direction, a fixer F is mounted on the block B so that a work W can be placed on the fixer F, a mark M is put on the block B or the fixer F or part of the block B or the fixer F is used as a mark, and one camera C is installed above the block B a predetermined distance K, apart from the work placement face of the block B perpendicular to the work placement face. The camera C or the block B is moved horizontally, in a diagonal direction in view from the camera C; and prior to this, during and after the movement, the figure image of the work W is imaged by the camera C so that the ridge line of the work W which cannot be viewed prior to the movement is captured, three-dimensional coordinate values for a measurement point on the ridge line is found, and the three-dimensional coordinate values are used to detect the deformation/distortion of the work W. COPYRIGHT: (C)2008,JPO&INPIT
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