| 摘要 |
PROBLEM TO BE SOLVED: To suppress thinning of a heater and occurrence of spark, also prevent occurrence of cyanogen, and efficiently raise temperature. SOLUTION: Body space that is surrounded by a furnace material and has the heater is shut off into a sample space and a heating space outside it with a soaking cylinder, a sample gas supplying means supplies sample atmosphere to the sample space, and a heater gas supplying means supplies heater atmosphere to the heating space. As the heater atmosphere, inert gas that does not invade the heater, for example helium gas, is used. In this case, for preventing heat dissipation from a furnace peripheral wall from increasing, the furnace peripheral wall is covered with a vacuum insulation layer allowing achievement of the thermal conductivity of about 1/10 of that of the atmospheric pressure. Thus, the temperature is raised more efficiently. COPYRIGHT: (C)2008,JPO&INPIT
|
