APPARATUS FOR ASSESSMENT OF WAFER LENS BY USING IMAGE OF THE WAFER LENS

摘要

A wafer lens evaluation apparatus using a wafer lens image is provided to perform more efficient wafer lens evaluation by evaluating one of lines of lens on a wafer. A wafer lens evaluation apparatus using a wafer lens image includes a transport stage(160), a sensor module, a light source(180), a controller(300), a PC(200), and a display device(210). The transport stage includes a wafer lens table for aligning and fixing wafer lenses on the wafer and moves in directions of orthogonal two axes. The sensor module is installed below the wafer lens and photographs the wafer lens. The light source is installed above the transport stage and provides light for photographing the wafer lens. The controller controls planar movement of the transport stage. The PC processes the image of the wafer lens transmitted from the sensor module. The display device displays the image of the wafer lens transmitted from the PC.