| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress heat generated at driving of a stage. <P>SOLUTION: A stage apparatus comprises: a stage 4; first magnets 9 mounted on the stage 4; repulsive force generating units each of which has a second magnet set 12a, 12b at an end of the moving stroke of the stage 4, and the magnet set is mounted as to face the corresponding first magnet 9; a driving unit which drives the stage 4 within the moving stroke of the stage 4; and eddy current brake units, each of which includes eddy current generating member sets 18a, 18b and the member set, is arranged capable of facing the corresponding first magnet and generating eddy current therein with the stage 4 moving thereto. <P>COPYRIGHT: (C)2008,JPO&INPIT |
