| 摘要 |
A catadioptric projection objective has a plurality of optical elements arranged along an optical axis to image a pattern arranged in an object surface into an image surface of the projection objective at unit magnification. The optical elements include: concave mirror positioned at a pupil surface; a lens arrangement including a plurality of lenses; a first reflecting surface arranged between the object surface and the lens arrangement to deflect radiation from the object surface towards the concave mirror; and a second reflecting surface arranged between the lens arrangement and the image surface to deflect radiation from the concave mirror towards the image surface. At least one lens of the lens arrangement is positioned in a pupil space optically near to the pupil surface.
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