发明名称 |
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摘要 |
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申请公布号 |
JP4134671(B2) |
申请公布日期 |
2008.08.20 |
申请号 |
JP20020302927 |
申请日期 |
2002.10.17 |
申请人 |
|
发明人 |
|
分类号 |
H01L21/3065 |
主分类号 |
H01L21/3065 |
代理机构 |
|
代理人 |
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主权项 |
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地址 |
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