PT RH BASED PLASMA GENERATION ELECTRODE, PLASMA GENERATION APPARATUS AND PLASMA PROCESSING SYSTEM

摘要

A long life plasma generation electrode in which emission of particles of worn materials is significantly reduced when plasma is generated by discharge and wear-out of the electrode is reduced extremely, and a plasma generation apparatus and a plasma processing system. In a plasma generation electrode of a plasma generation apparatus (7) for generating plasma P of a supply gas by discharge, at least the discharge surface is formed of an electrode material of Pt Rh based metal represented by Pt_1-YRh_Y (0=Y<1). The plasma generation apparatus (7) generates plasma using this plasma generation electrode, and a plasma processing system (2) performs plasma processing of the surface of an article to be processed using this plasma generation apparatus.