| 摘要 |
PROBLEM TO BE SOLVED: To easily oppose a desired opening to an objective lens. SOLUTION: This plate inspection device includes a control unit, a stage having a flat plate 32 for supporting a plate 2 having a plurality of holes 2a formed thereto and a microscope provided with the stage. The control unit has first-third memory parts, a measuring part, a calculation part and a movement control part. The calculation part substitutes the coordinates stored in the first-third memory parts 42-44 for two formulae of Xm'=X1'+(Xm-X1)×(X2'-X1')/(X2-X1) and Ym'=Y1'+(Ym-Y1)×(Y2'-Y1')/(Y2-Y1) to calculate the coordinates (Xm' and Ym') of the desired hole 2a of the plate 2 arranged the position shifted from the predetermined position of the flat plate 32. Then, the movement control part controls the stage so that the coordinates (Xm' and Ym') calculated by the calculation part coincides with the optical axis of an objective lens. COPYRIGHT: (C)2008,JPO&INPIT
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