发明名称 Dresser and Dressing Device
摘要 A dresser (21) for dressing a polishing pad used for polishing a material to be polished is disclosed, the dresser (21) comprising: a dresser principal (22) and a dressing-working part (23) which is provided as a body other than the dresser principal (22); and a holding means for holding the dressing-working part (23) in such a manner that the dressing-working part (23) can be attached to and detached from the dresser principal (22). <IMAGE>
申请公布号 KR100851440(B1) 申请公布日期 2008.08.08
申请号 KR20000046741 申请日期 2000.08.12
申请人 发明人
分类号 H01L21/304;B24B37/04;B24B53/017;B24B53/12;B24D7/06 主分类号 H01L21/304
代理机构 代理人
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