DEVICE AND METHOD FOR PROCESSING SUBSTRATE, AND METHOD FOR MANUFACTURING DISPLAY COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a device for processing a substrate capable of smoothly and rapidly conducting a maintenance work while improving an operating ratio and a production efficiency. SOLUTION: Maintenance regions 33-1 and 33-2 are fitted on both left and right sides while holding a processing region 31. Two processing devices 17-1 and 17-2 are moved among the maintenance region 33-1 to a processing region 31 to the maintenance region 33-2 along the same axis of movement by a Y shifter 19. The maintenance regions 33 are fitted at every processing device 17, and are not shared among the two processing devices 17. One processing device 17-1 is moved between the processing region 31 and the maintenance region 33-1 on the left side, and the other processing device 17-2 is moved between the processing region 31 and the maintenance region 33-2 on the right side. COPYRIGHT: (C)2008,JPO&INPIT