| 摘要 |
<p>A variable spectroscopic element, which is configured to realize miniaturization, reduce noise, and detect a gap size between optical substrates with good accuracy, achieves a desired spectroscopic characteristic. The variable spectroscopic element (1) is provided with first and second optical substrates (4a, 4b) provided opposite to each other with a gap, optical coat layers (3) formed on opposite surfaces of the first and second optical substrates (4a, 4b) opposing to each other, an actuator (4c) for changing the gap between the first and second optical substrates (4a, 4b), a first sensor unit (6a) provided on the first optical substrate (4a) to detect the gap between the first and second optical substrates (4a, 4b), and a second sensor unit (6b) provided opposite to the first sensor (6a) on the second optical substrate (4b) to detect the gap between the first and second optical substrates (4a, 4b), wherein the numbers of first and second sensor electrodes (6a, 6b) are different.</p> |
