| 摘要 |
A discharge lamp is provided to radiate vacuum ultraviolet light having high intensity of radiation by shifting an ultraviolet absorbing unit to a short wavelength side. An excimer lamp(10) includes an external tube(12) and an internal tube(13). The external tube has a cylindrical structure including a synthetic quartz glass. The internal tube is installed in the inside of the external tube. The internal tube is composed of a cylindrical tube having an outside diameter smaller than an inside diameter of the external tube. A discharge receptacle(11) having a double tube structure is formed between the external tube and the internal tube. An external electrode(15) has a shape of net and is attached to an outer circumference of the external tube. An internal electrode(16) is composed of an aluminum plate and is attached to an inner circumference of the internal tube.
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