| 摘要 |
<p>An apparatus and a method for forming a pattern are provided to increase productivity by transferring alternately a plurality of substrates on one transferring path. A moving unit includes a first and second moving stages(12a,12b), a guide device, and a moving device. The first and second moving stages are used for supporting a first and second substrates, respectively. The guide device performs a guiding operation to transfer the first and second moving stages on a transferring path. The moving device moves the first and second moving stages on the transferring path, respectively. Substrate position detectors(25a,25b) detects position offset values of the substrates by referring to the proper positions. A pattern data corrector corrects the pattern data according to the position offset values.</p> |
