,申请号JP20030332908-传众专利搜索

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发明名称
摘要
申请公布号	JP4127174(B2)	申请公布日期	2008.07.30
申请号	JP20030332908	申请日期	2003.09.25
申请人		发明人
分类号	H01L21/205;H05B3/06;C23C16/46;H01L21/3065;H05B3/74	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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