| 摘要 |
PROBLEM TO BE SOLVED: To efficiently deposit an alignment layer with a desired liquid crystal alignment properties. SOLUTION: Transparent electrode films 12, 22 are deposited on substrates 11, 21 with vapor deposition, and subsequently alignment layers are formed on surfaces of the transparent electrode films 12, 22 with vapor deposition. The transparent electrode films 12, 22 deposited with vapor deposition have roughness as indicated by surface roughness of 4 nm or larger and 12 nm or smaller, and the alignment layer with 2°or larger and 5°or less pretilt angle is deposited on them, even when deposition pressure at depositing the alignment layers is low and a deposition angleθis so small as to be 25°or larger and 45°or smaller. When the alignment layer is deposited with a small deposition angleθ, not only high deposition speed is attained, but also an alignment layer with high film density is formed, since the high film density of the alignment layer brings about superior barrier properties, but the lifetime of the liquid crystal display device becomes prolonged. COPYRIGHT: (C)2008,JPO&INPIT
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