SEMICONDUCTOR TEST DEVICE INCLUDING A PREHEATING PORTION AND PREHEATING METHOD

摘要

A semiconductor test device having a preheating unit and a preheating method thereof are provided to reduce a soak time by having a bi-directional heater. A semiconductor test device having a preheating unit includes a main test unit, a handler, and a preheating unit(120). The main test unit tests a semiconductor device which is stacked on pocket plates. The handler handles the pocket plates. The preheating unit pre-heats the semiconductor device before the semiconductor device is inserted to the main test unit. The preheating unit heats the upper and rear surfaces of the pocket plates at the same time. The preheating unit includes a preheating chamber(121), a simultaneous transfer unit(125), a first heater(129a), and a second heater(129b). The preheating chamber has a loading gate into which the pocket plate is inserted, and an unloading gate from which the pocket gate is withdrawn. The simultaneous transfer unit simultaneously transfers the pocket plates which are arranged from the loading gate to the unloading gate. The first heater heats the rear plane of the pocket plates. The second heater heats the upper surfaced of the pocket plates.