| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser device capable of stabilizing energy of a laser light. <P>SOLUTION: A laser device has an optical system for sampling part of a laser beam oscillated from an oscillator and means for generating an electrical signal including energy variations of the laser light as data using part of the laser light. The laser device decides a periodical frequency from energy variations of the laser light by providing signal processing with the electrical signal and is controlled so as to suppress energy variations of the laser light based on the periodical frequency. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
