发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method which can achieve a power management semiconductor device and an analog semiconductor device which are low cost, can be shortened in manufacturing period, use less power, and have a high driving performance and a high accuracy. SOLUTION: In the manufacturing method for a power management semiconductor device and an analog semiconductor device which include a CMOS, the resistance of a drain region is reduced at surge input by expanding upwards a silicon region which constitutes a lightly doped drain and thermal destruction is suppressed by suppressing a local increase in temperature. Consequently, a power management semiconductor device and an analog semiconductor device with a higher degree of freedom in designing a transistor can be achieved. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008153346(A) 申请公布日期 2008.07.03
申请号 JP20060338256 申请日期 2006.12.15
申请人 SEIKO INSTRUMENTS INC 发明人 SAITO NAOTO
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
主权项
地址