发明名称 METHODS FOR PLASMA DIAGNOSTICS AND THE MEASUREMENT OF THIN FILMS
摘要 Methods for obtaining and analyzing data from a spectral source is provided. The method includes identifying an environment that is capable of generating spectral information, and obtaining the generated spectral information from the environment. The method further includes splitting the generated spectral information into a plurality of spectral data units. The spectral data units are further captured in separate storage entities and separately processed in parallel in order to produce a complete processing and quantification of the environment.
申请公布号 US2008158557(A1) 申请公布日期 2008.07.03
申请号 US20070963974 申请日期 2007.12.24
申请人 LAM RESEARCH CORPORATION 发明人 CRAVEN DAVID;ROBERTS RYAN
分类号 G01J3/00 主分类号 G01J3/00
代理机构 代理人
主权项
地址