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发明名称
ULTRASONIC LINEAR MOTOR
摘要
申请公布号
EP1938397(A1)
申请公布日期
2008.07.02
申请号
EP20060793332
申请日期
2006.09.07
申请人
PHYSIK INSTRUMENTE (PI) GMBH & CO. KG
发明人
WISCHNEWSKIJ, ALEXEJ;WISCHNEWSKIJ, WLADIMIR
分类号
H01L41/09
主分类号
H01L41/09
代理机构
代理人
主权项
地址
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