| 摘要 |
<p>A proposition of the present invention is to provide a liquid immersion microscope device enabling nondestructive liquid immersion observation of a substrate without deteriorating quality of the substrate. To attain this, a liquid immersion microscope device of the present invention includes a supporting unit 11 ~ 13 supporting a substrate 10A as an observation target, an objective lens 14 of a liquid immersion type, a first.supplying unit 15, 16 supplying ultrapure water as a liquid for observation to a gap between a tip of the objective lens and the substrate, a first draining unit 20 ~ 22 draining the liquid for observation after observation of the substrate, a second supplying unit 17~19 supplying a liquid for cleaning, which is different from the liquid for observation drained by the first draining unit 20 ~ 22, to an area, of the substrate, that has been in contact with the liquid for observation, and a second draining unit 20 ~ 22 draining the liquid for cleaning after the substrate is cleaned.</p> |
