| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of making a measure to prevent reverse flow of particles easily. SOLUTION: A reverse flow prevention structure 30 formed out of a honeycomb structure body including a plurality of through pores 30a at an end part is provided in an intake port 5 side of a casing 2. The reverse flow prevention mechanism 30 is fixed by a fixing part 31, a holding plate 32 fixing the reverse flow prevention structure 30, and screws 33 fixing the presser plate 32 on the casing 2. Consequently, the reverse flow prevention structure 30 can be easily attached and detached without disassembling a turbo-molecular pump 1. When the particle taken from an intake port 5 impinges on a moving blade row 8 in the turbo-molecular pump 1, the particle is bounced back in the reverse flow prevention structure 30 side and enters the through pore 30a. Since kinetic energy of the particle is attenuated while the particle repeats impingement on a side wall of the through pore 30a, the particle can not reach a vacuum vessel. COPYRIGHT: (C)2008,JPO&INPIT
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