| 摘要 |
PROBLEM TO BE SOLVED: To shorten a measuring time by omitting the acquisition of useless data. SOLUTION: A height determination reference position is set beforehand between the upper bound position and the lower bound position of a moving range of an imaging lens provided movably in the direction of the optical axis of an objective lens. When the imaging lens is inside the moving range, a plurality of beam spots are generated by a beam spot generation means arranged at a position optically conjugate with the image forming position of the objective lens, the plurality of beam spots are projected onto an object to be measured by the objective lens, the upside of the object to be measured is imaged at predetermined time intervals while moving the imaging lens and the brightness of each reflected light from the plurality of beam spots on the object to be measured is detected, the minute height of the object to be measured is determined to be within reference values, when the maximum brightness is detected in all of the rays of the reflected light between the upper bound position and the height determination reference position, and the minute height of the object to be measured is determined to be outside the reference values, when the maximum brightness is not detected in the rays of certain reflected light between the lower bound position and the height determination reference position. COPYRIGHT: (C)2008,JPO&INPIT
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