| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam source device wherein adsorbed gas molecules can be removed even from components such as an extraction electrode and the like other than an electron beam source. SOLUTION: In this electron beam source device at least equipped with a negative electrode 1 forming the electron beam source, the extraction electrode 2 on which a positive voltage opposite to a voltage applied on the negative electrode is applied to extract the electron beams from the negative electrode 1, and an electron beam lens to focus the electron beams, the extraction electrode 2 can heat the extraction electrode 2 itself by ohmic-resistance heating by passing a current to it, and a self heating and cleaning function to remove gas adsorbed to the extraction electrode 2 by heating is provided. COPYRIGHT: (C)2008,JPO&INPIT
|
