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发明名称
Fabrication of microstructures for micro/nano-fluidic devices and MEMS microdevices using inorganic polymers and hydrophilic polymers
摘要
申请公布号
KR100837806(B1)
申请公布日期
2008.06.13
申请号
KR20080016433
申请日期
2008.02.22
申请人
发明人
分类号
B82B3/00;B82B1/00
主分类号
B82B3/00
代理机构
代理人
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