DEVICE FOR REMOVING POWDER IN SEMICONDUCTOR EQUIPMENT EXHAUST LINE

摘要

An apparatus for removing a powder in an exhaust line of semiconductor equipment is provided to minimize a powder exhausted through the exhaust line and to realize an easy maintenance by employing a flow velocity control plate. An inlet(113) and an outlet(115) of an exhaust line(50) are formed at both sides of a body case. A nitrogen sprayer(120) is installed on a ceiling in the body case. Plural spray nozzles(121) for spraying nitrogen downwardly are formed on the nitrogen sprayer. A flux controller(130) supplies the nitrogen to the nitrogen sprayer. A heater line(150) is installed on a bottom surface in the body case. A filter member(170) is installed on the outlet of the body case. A flow velocity control plate(190) is installed on an inner wall of the exhaust line at the outlet to constantly control a flow velocity. A handle is formed at a side of the filter member to be easily detachable. The flow velocity control plate is inclined by a predetermined angle. A through hole is formed at an end of a lower portion of the inclined surface of the flow velocity control plate.