Method for coating a substrate with a catalytically active material comprises charging a vacuum chamber with a substrate, closing and evacuating the chamber, cleaning the substrate and further processing

摘要

Method for coating a substrate with a catalytically active material comprises charging a vacuum chamber with a substrate, closing and evacuating the chamber, cleaning the substrate by introducing a gaseous reducing agent, enlarging the substrate surface by depositing a vapor-like component on the substrate surface, coating the surface of the substrate with one or more metals or their oxides, flooding the chamber and removing the substrate. An independent claim is also included for a device for coating a substrate.