| 摘要 |
An impedance matching apparatus 3 calculates a forward wave voltage Vfo and a reflected wave voltage Vro at an output terminal 3 b, based on a forward wave voltage Vfi and a reflected wave voltage Vri at an input terminal 3 a, on information on variable values of variable capacitors VC 1 , VC 2 acquired in advance through measurement, and on a T parameter of the impedance matching apparatus 3 corresponding to the information on the variable values of variable capacitors VC 1 , VC 2 . The impedance matching apparatus 3 calculates an input reflection coefficient Gammai at the input terminal 3 a corresponding to the information on the variable values of the variable capacitors VC 1 , VC 2 , based on the forward wave voltage Vfo, the reflected wave voltage Vro and the T parameter. The impedance matching apparatus 3 selects the lowest absolute value out of absolute values |Gammai| of the input reflection coefficients corresponding to the variable values of the variable capacitors VC 1 , VC 2 , and adjusts the impedance of the variable capacitors VC 1 , VC 2 based on the lowest value.
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