| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid jet head capable of preventing a deterioration in the capacitor structure, and a manufacturing method for the liquid jet head. SOLUTION: This liquid jet head 1000 comprises: a substrate 10: a pressure generating chamber 16 which is provided in the substrate; an elastic plate 20 which is provided above the substrate; a capacitor structure portion 60 which is provided above the elastic plate, and which comprises a lower electrode layer 30, a piezoelectric material layer 40 and an upper electrode layer 50; a protective layer 62 which is provided at least on the side surface of the capacitor structure portion; a porous layer 80 which is provided above the capacitor structure portion; and a sealing layer 90 which is provided on the porous layer. A void portion 72 is formed between the capacitor structure portion and the porous layer. COPYRIGHT: (C)2008,JPO&INPIT
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