| 摘要 |
A micro lens for an image sensor and a forming method thereof are provided to form the micro lens as a suitable curvature by performing only a PEB photolithography process, and by using a polycarbonate based photoresist. A micro lens of an image sensor is formed above a color filter array, so as to collect light into a light sensing unit by refracting incident light. A polycarbonate based photoresist is coated(S200). An exposure process of a defocus condition is performed(S202). A PEB(Post Exposure Bake) process is performed(S204). And a developing process is performed(S206).
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