| 摘要 |
A specimen stage for charged-particle scanning microscopy comprises a non-magnetic platform for supporting a specimen, at least one probe pin assembly including a probe pin for contacting a selected portion of the specimen, the probe pin being electrically insulated from the platform and being electrically coupled to an output, and an elevator mechanism operable to move the platform for bringing the specimen into and out of electrical contact with the probe pin(s), substantially without moving the probe pin(s).
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