准分子光照射机,申请号TW096130431-传众专利搜索

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发明名称	准分子光照射机
摘要
申请公布号	TW200822965	申请公布日期	2008.06.01
申请号	TW096130431	申请日期	2007.08.17
申请人	牛尾电机股份有限公司	发明人	菱沼宣是;中村雅规
分类号	B01J19/12(2006.01);G02F1/13(2006.01);H01L21/302(2006.01)	主分类号	B01J19/12(2006.01)
代理机构		代理人	林志刚
主权项
地址	日本

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