| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming apparatus which requires no complex drive control structure nor a large system, can uniformly spray mist to an object to be treated with a large area to make the thickness of formed film uniform. SOLUTION: The film forming apparatus 1 for forming a thin film over one surface of the object 2 to be treated by a spray thermal decomposition method comprises at least a support means 11 for mounting the object to be treated, and a discharge means 12 for spraying mist 3 consisting of a raw material solution of the thin film toward the one surface of the object to be treated. A nozzle installed in the discharge means has a first part 12a at a mist carrying-in side, a second part 12b at a mist discharge side, and a third part 12c for connecting the first part and the second part. The discharge means has a mist control means 13 for controlling the face velocity of mist discharged from the second part. COPYRIGHT: (C)2008,JPO&INPIT
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