| 摘要 |
PROBLEM TO BE SOLVED: To resolve problems of a conventional cleaning device wherein a heat-melting adhesive attached on the surface of a treating object cannot be appropriately removed. SOLUTION: This cleaning device for removing the heat-melting adhesive 101 attached on the surface of a thin plate-like treating object 100, includes: a first front surface spray part 121 spraying a first fluid for removing the adhesive 101 to the front surface of the treating object 100; a first rear surface spray part 131 spraying a second fluid for preventing attachment of the adhesive 101 to a region including at least an outer edge part of the rear surface of the treating object 100; and a first heating part 125 heating the first fluid sprayed by the first front surface spray part 121. COPYRIGHT: (C)2008,JPO&INPIT
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