| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the accuracy of component positioning performed based on their characteristics extracted from a profile line and used to position a component. <P>SOLUTION: Characteristics (BEAM_A) for coarse positioning, characteristics (BEAM_B) for fine angle correction, and characteristics (BEAM_C) for fine magnification correction, are extracted from the profile line 20 of a reference picture image of the component. The respective characteristics are beams each comprising two groups when the coordinates of points (A1, A2, ...) on the profile line 20 and density gradient vectors (U1, U2, ...) are assumed to be a group, and values expressing positioning performance are given to the beams. In positioning the component, characteristics having high positioning performance are used and positioning is performed by aligning them with the profile lines of a component picture image to be positioned. In such a structure, the respective characteristics are given values expressing positioning performance. Since respective characteristics having high positioning performance are used to perform coarse positioning and fine correction, highly accurate positioning is made possible. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
