| 摘要 |
PROBLEM TO BE SOLVED: To provide equipment for manufacturing a liquid crystal panel capable of monitoring the illuminance of an ultraviolet ray applied on the surface of a substrate to be processed by suppressing the deterioration of a liquid crystal body and an optical reaction substance, and to provide a method for manufacturing the liquid crystal panel using it. SOLUTION: The equipment for manufacturing the liquid crystal panel includes: a processing chamber 50 for processing a substrate 10 to be processed enclosing a liquid crystal body 17 containing an optical reaction substance 18 in the inside; a plurality of lamps 52 for forming alignment sections 21, 22 in the inside of the substrate 10 to be processed by being arranged in the processing chamber 50, and irradiating the substrate 10 to be processed with the ultraviolet ray to react the optical reaction substance 18; a filter 53 for suppressing the transmission of the ultraviolet ray of a wavelength region of 340 nm or less of wavelength by facing the lamps 52; an illuminance meter 55 for measuring the illuminance of the plurality of the lamps 52; and a lamp control device 7 for controlling the electric power of the plurality of the lamps 52 so that a uniformity ratio of illumination of an ultraviolet irradiation face of the substrate 10 to be processed is 75% or more. COPYRIGHT: (C)2008,JPO&INPIT
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