| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable as flexible power supply as possible for various kinds of electrodes of a plasma chamber in a method for drive controlling, with the use of drive control signals C, D generated by high-frequency power generators 3, 4 which supply high-frequency energy to a plasma process. <P>SOLUTION: Pulse signals E, F are generated, and by using one each of drive control signals C, D and pulse signals E, F, high-frequency energy signals G, H pulsated by each of the high-frequency power generators, are generated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
