| 发明名称 |
SUPPORT FOR MICROELECTRONIC, MICROOPTOELECTRONIC, OR MICROMECHANICAL DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for guaranteeing a micromachine life. SOLUTION: A support 60 has a base 61 wherein a hollow portion 65 to accommodate a movable structure 91 is formed, and deposits 63 of a gas absorbing material are formed on a ceiling of the hollow portion by reactive sputtering. The support 60 and a base 92 comprising the micromachine are bonded so that the movable structure 91 on the base 92 is coated with the support 60. The hollow portion 65 also constitutes a path to the deposits 63 of the gas absorbing material. COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2008118147(A) |
申请公布日期 |
2008.05.22 |
| 申请号 |
JP20070295918 |
申请日期 |
2007.11.14 |
| 申请人 |
SAES GETTERS SPA |
发明人 |
AMIOTTI MARCO |
| 分类号 |
G02B26/08;H01L23/26;B01D53/14;B01D53/28;B01J20/02;B01J20/04;B81B3/00;B81B7/00;B81C1/00;C23C14/04;C23C16/04;H01L21/02;H01L21/68 |
主分类号 |
G02B26/08 |
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