发明名称 DISPLAY DEVICE AND MANUFACTURING METHOD OF DISPLAY DEVICE
摘要 A display device and a method of manufacturing the display device are provided to improve crystallinity of polysilicon layer of an MIS(Metal Insulator Semiconductor) transistor when the MIS transistor has a bottom gate structure. A display device includes MIS transistors formed in such a manner that a conductive layer, an insulating layer(102) and a semiconductor layer are laminated on a substrate(100). The display device includes a first MIS transistor formed in a first region of the substrate and a second MIS transistor formed in a second region different from the first region. The first and second MIS transistors have gate electrodes(GP1,GP2) between the substrate and the semiconductor layer. The semiconductor layer(SC1) of the first MIS transistor is made of amorphous silicon and the semiconductor layer(SC2) of the second MIS transistor includes polysilicon. The gate electrode of the second MIS transistor is thinner than the gate electrode of the first MIS transistor.
申请公布号 KR20080043247(A) 申请公布日期 2008.05.16
申请号 KR20070114865 申请日期 2007.11.12
申请人 HITACHI DISPLAYS, LTD. 发明人 NODA TAKESHI;KAMO TAKAHIRO;SHINMOTO HIDEAKI
分类号 G02F1/136;G02F1/1345;G02F1/1368;H01L21/20;H01L21/336;H01L21/8234;H01L27/08;H01L27/088;H01L29/786 主分类号 G02F1/136
代理机构 代理人
主权项
地址