摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of continuously changing an impressed voltage and examining potential differences between layers. SOLUTION: An electronic spectroscopic measuring apparatus has a voltage impressing apparatus constituted of a first terminal electrically connected to an upper layer of a sample arranged in a vacuum chamber and having a multilayer structure, a second terminal electrically connected to a lower layer of the sample, a transformer type voltage impressing device arranged outside the chamber, and a wiring connecting both terminals and an output terminal of the transformer type voltage impressing device through a partition wall of the chamber. COPYRIGHT: (C)2008,JPO&INPIT
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