发明名称 Coating facility and method for coating
摘要 <p>Coating installation (1) comprises a control unit for controlling a source of electromagnetic energy so that the source emits pulses which produce plasma pulses with a duration of length D and a pause of length P. The pulse pause in milliseconds is longer between two neighboring pulses. An independent claim is also included for a method for coating objects with alternating layers using the above installation.</p>
申请公布号 EP1921179(A2) 申请公布日期 2008.05.14
申请号 EP20070021685 申请日期 2007.11.08
申请人 SCHOTT AG 发明人 MOELLE, CHRISTOPH, DR.;BEWIG, LARS, DR.;KUEPPER, THOMAS
分类号 C23C16/515;C23C16/455 主分类号 C23C16/515
代理机构 代理人
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