<p>Coating installation (1) comprises a control unit for controlling a source of electromagnetic energy so that the source emits pulses which produce plasma pulses with a duration of length D and a pause of length P. The pulse pause in milliseconds is longer between two neighboring pulses. An independent claim is also included for a method for coating objects with alternating layers using the above installation.</p>
申请公布号
EP1921179(A2)
申请公布日期
2008.05.14
申请号
EP20070021685
申请日期
2007.11.08
申请人
SCHOTT AG
发明人
MOELLE, CHRISTOPH, DR.;BEWIG, LARS, DR.;KUEPPER, THOMAS