| 摘要 |
An interface apparatus for controlling communication between semiconductor manufacturing equipment and a vacuum pump is provided to improve productivity by blocking the inflow of an electrical noise and integrating a signal scheme between the semiconductor manufacturing equipment and the vacuum pump. Semiconductor manufacturing equipment(200) produces a semiconductor. A vacuum pump(100) maintains a vacuum state of the semiconductor manufacturing equipment. An interface apparatus(300) is connected to the semiconductor manufacturing equipment and the vacuum pump through a cable. The interface apparatus transmits data for releasing an interlock according to a lock mode manipulation in case an error is occurred in the vacuum pump and normal data is not transferred from the vacuum pump to the semiconductor manufacturing equipment. The interface apparatus is operated in a cut mode in case electrical noises are generated to release a communication connection between the semiconductor manufacturing equipment and the vacuum pump.
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