ELECTRICAL MICROVALVE AND METHOD OF MANUFACTURING THEREOF

摘要

The present invention relates to a microvalve for controlling a fluid flow in a microchannel, to a microfluidic circuit using the microvalve, and to a manufacturing method thereof. The microvalve has a first electrode located on a portion of the microchannel, a second electrode over the microchannel and substantially aligned with the first electrode forming a membrane with substantially no resilience. In function, upon application of an electric force on the first and second electrodes, the second electrode draws nearer the first electrode, thus obstructing the microchannel. The microfluidic circuit comprises multiple microchannels and at least one microvalve affixed to one of the multiple microchannels, wherein the at least one microvalve is adapted to indirectly actuate a flexible valve adapted to regulate a flow of fluid in another one of a multiplicity of microchannels.