发明名称 |
Method and system for centrally-controlled semiconductor wafer correlation |
摘要 |
A centrally-controlled correlation system for testing a correlation wafer and comparing the testing results with the wafer's reference data that has been determined previously. The testing instructions and the correlation criteria are stored and transmitted from a central database. Such centrally-controlled correlation system improves the reliability of the correlation results and reduces the time to correlate a correlation wafer.
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申请公布号 |
US2008106278(A1) |
申请公布日期 |
2008.05.08 |
申请号 |
US20060556724 |
申请日期 |
2006.11.06 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
HUO HSING YA;HSIEH CHUNG-LIN;LEE TSUNG-YU;YEN-NI YANG |
分类号 |
G01R31/26;G06F19/00 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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