摘要 |
PROBLEM TO BE SOLVED: To provide a sample making device which can easily make a sample suitable for a TEM observation and provide a sample making method. SOLUTION: The sample making device is provided with an irradiating optical unit to form an ion beam, a fine and thin sample cut from an observation part of a sample by an ion beam, a sample holder on which the fine and thin sample is mounted and adhered and a shifting means which has a probe adhered to the fine and thin sample and shifts the fine and thin sample to the sample holder with the probe in between. In addition to the shifting means, there is provided a posture adjusting needle to adjust a posture of the fine and thin sample which is mounted on and adhered to the sample holder. COPYRIGHT: (C)2008,JPO&INPIT
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