| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device enabling transfer responding to increase in the size of workpieces while avoiding generation of particles. SOLUTION: In the transfer device 30, base end sides of base end side arms 2 of a pair of free arms 4 comprising two arms (the base end side arm 2 and tip side arm 3) are rotatably mounted on base tables 1, and transfer arms 5 to which tip sides of the tip side arms 3 are rotatably connected are provided. Slide parts 20 for sliding the base tables 1 to the transfer direction are provided. COPYRIGHT: (C)2008,JPO&INPIT
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