SURFACE ACOUSTIC WAVE ELEMENT, AND SURFACE ACOUSTIC WAVE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface acoustic wave element in which an IDT electrode having electrode fingers formed by layering a plurality of conductor layers has improved durability by suppressing the occurrence of fracture or peeling, etc. in these conductor layers, and to provide a surface acoustic wave device mounted with the element.

SOLUTION: The surface acoustic wave element 1 includes the IDT electrode 11 having the electrode fingers 11a on a piezoelectric substrate 10. The electrode fingers 11a are formed by layering an intermediate layer 12 and an electrode layer 13 having a thermal expansion coefficient larger than that of the intermediate layer 12. The electrode finger 11a has a trapezoidal cross section becoming wider toward the piezoelectric substrate 10. An angle α1formed by a side face 1 of the intermediate layer 12 is larger than an angle β1formed by a side face of the electrode layer 13.

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