Coated Component Consisting of Quartz Glass, and Method for Producing Said Component

摘要

The invention relates to methods for producing a coated component consisting of quartz glass, according to which the component surface is at least partially provided with a SiO₂ glass composition that differs from the quartz glass of the base body. The aim of the invention is to provide a novel way of coating a quartz glass component with a SiO₂ glass composition that can be produced in a cost-effective, reproducible manner, with any thickness, and can fulfil various functions according to the concrete embodiment thereof. To this end, an amorphous slip containing SiO₂ particles is produced and applied to the surface of the base body, forming a slip layer which is dried and then vitrified, forming a SiO₂ glass composition. The quartz glass components coated in this way can be advantageously used especially in the production of semiconductors.