SUBSTRATE CONVEYING APPARATUS, AND SUBSTRATE CONVEYING METHOD

摘要

PROBLEM TO BE SOLVED: To improve a delivering speed of each of substrates P between a main conveyer 10 and a branched conveyer 20. SOLUTION: The apparatus is provided with the main conveyer 10 for conveying the substrates P one by one, the branched conveyer 20 horizontally branched for the main conveyer 10, and a substrate delivering section 40 for delivering the substrates P from the main conveyer 10 to the branched conveyer 20 or from the branched conveyer 20 to the main conveyer 10 while horizontally rotating the substrates P so that the direction for the advancing direction of the substrates P may not change. COPYRIGHT: (C)2008,JPO&INPIT