METHOD OF MANUFACTURING MICRO-CHEMICAL CHIP

摘要

PROBLEM TO BE SOLVED: To solve a problem that the surface unevenness of a weight is transferred on the surface of glass to be laminated to degrade optical characteristics when the melting temperature is raised to prevent the occurrence of unfused parts over the whole surface to be laminated when a plurality of glass plates are joined by thermal fusing in a state of applying the weight. SOLUTION: In the manufacture of glass joined body by joining two glass plates by thermal fusion, a glass plate surface-smoothened to be≤2.5 nm surface undulation (ωa) in 0-5 nm measuring wavelength range and≤3μm difference of the in-plane plate thickness by precision polishing is used. The thermal fusion temperature to join the glass plates is a temperature equal to or above the glass transition point and below the yielding point. The thermal fusion is preferably carried out at the temperature not higher than a temperature when the viscosity (η)reaches logη=12.0. COPYRIGHT: (C)2008,JPO&INPIT